LOAD TAKING METHOD, LOAD TAKING DEVICE, AND LOAD RECEIVING DEVICE FOR PLATE-LIKE MEMBER

摘要

PROBLEM TO BE SOLVED: To prevent static electricity upon transferring of a plate-like member.;SOLUTION: A first body levitating device composing an object receiving device is equipped with a plurality of diaphragms 13a-13e formed in rectangular plate-like shapes. Each of the diaphragms 13a-13e is earthed. The second body levitating device composing a load taking device is equipped with a pair of long diaphragms 27 which are earthed. The plate-like member 14 is carried in a non-contact state from over the first load levitating device to over the second load levitating device. When the plate-like member 14 is maintained in a levitating state over the first or the second load levitating device, the excitation state of the diaphragms 13a-13e and 27 are controlled so that gap G between each of the diaphragms 13a-13e and the plate-like member 14, and between each of the diaphragms 27 and the plate-like member 14 is fixed, and the occurrence of static electricity is suppressed.;COPYRIGHT: (C)2004,JPO