WAVEGUIDE TYPE FARADAY ROTATION ELEMENT AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To manufacture a waveguide type Faraday rotation element which can be integrated with an optical device and has high performance.;SOLUTION: An InP:Mn/InGaAsP core layer 12 wherein an InP:Mn layer 12a is interposed between InGaAsP layers 12b is formed on an InP cladding layer 11 and an InP:Mn cladding layer 13 is formed thereon to form the waveguide type Faraday rotation element 10. Thereby, the waveguide type Faraday rotation element 10 can be manufactured by using an InP based semiconductor material, a region where light transmitted in the waveguide overlaps with a layer containing Mn is increased and interaction of light and Mn can be heightened. Mn can be effectively introduced to the InP:Mn layer 12a and the InP:Mn cladding layer 13 by introducing Mn when the InP:Mn layer 12a or the InP:Mn cladding layer 13 is formed or when a semiconductor layer to be the underlayer layer of these layers is grown.;COPYRIGHT: (C)2004,JPO