The bolometer material, production method of the bolometer thin film and the bolometer thin film, and the infrared ray inspection element which uses that

摘要

Temperature coefficient of resistance (|TCR|) The high rag meter thin film is formed with simple manufacturing process, the infrared ray inspection element of high sensitivity is offered.As for this invention, past compared to temperature coefficient of resistance (|TCR|) High Z _{yCuO x} (in formula, Z, one kind or two kinds or more of alkaline earths metal, one kind or two kinds or more of rare earth element which is chosen from the yttrium or lanthanides element, the periodic table which is chosen from the bismuth, the lead, thallium, the mercury or cadmium 5th or displays or more of element of 6th period, or the kalium or the sodium either one kind or two kinds, y displays the quantity of 0y2, x displays the quantity of 0.5yx1.5+2y.)So the rag meter which uses the thin film of the oxide which is displayed is offered. This is produced by forming the rag meter thin film the blend of the oxide of Cu such as the blend of Cu₂ O or CuO or Cu₂ O and CuO and the oxide of the above-mentioned various elements which are displayed with Z, or those compound oxides as a target, with sputtering.