Method for producing a pyroelectric sensor with a thin pyroelectric layer that requires electric polarization

摘要

By one surface of the silicon substrate to form a layer that is pyroelectric pyroelectric thin film that is a silicon wafer, and a method of manufacturing the pyroelectric multiple sensors. It is provided between the upper electrode and the lower electrode of the electric polarization pyroelectric thin film forms a pixel that forms these sensors. In order to protect the wafer when the short circuit occurs between the two electrodes of a pixel, by interconnecting these electrodes by a subset for performing the electrical polarization, the resistance in series with the upper electrode or the lower electrode are arranged. The electric polarization is performed, electrical connection connecting the upper or lower electrode is removed, the sensor is operated, the supply of basic electrical signal by each of the pixels is possible. Also, in order to minimize the risk of short circuits, in order to reduce the stray capacitance of the electrode, the lower electrode and the upper electrode of the pixel is structured. When crossing so as to project in a common plane of the wafer connection paths, these intersections are preferably provided between the respective resistor and electrode. Figure 1