Position detection method, position detecting apparatus, exposure method, exposure apparatus, control program, and device manufacturing method

摘要

Based on the observations of the object obtained by the observation device, the coincidence degree calculation device, while moving the plurality of regions with a mutual positional relationship between the predetermined observation coordinate system of the object, the observation in the area each of the plurality in at least for observation of the pair, and calculates the degree of coincidence between areas considering the regions between symmetry predetermined (step 151-160). The position information calculating device obtains the relationship between the area between the degree of coincidence between the moving position of the observation coordinate system of a plurality of regions, the observation of a plurality of regions on the basis of the relationship, for example between the regions matching degree is maximum By determining the position of the coordinate system, to determine the position information of the object (step 161). As a result, it is possible to detect the position information of the object with high accuracy.