Size proofreading sample on-board sute - ji, and size proofreading sample

摘要

PURPOSE: To provide a dimension calibrating specimen for calibration of the dimension or magnification of a scanning electron microscope such as a length measuring SEM, with which the installation can be made simply and a precise calibration can be made. ;CONSTITUTION: A calibrating specimen is prepared by mounting a base board 2 having a fine calibration pattern in a holder 1 having a reference surface 3 which is in compliance with the pattern direction. Use of a diffraction grating pattern provided on a (110) Si substrate enables precise calibration, and calibration in the longitudinal and the transverse direction can be done well by providing two perpendicularly intersecting substrates as given above. This calibration specimen allows performing precise calibration simply at any time as needed. Since the diffraction grating of the calibration pattern is uniform within a range of several millimeters, the position of the calibration pattern can be located automatically by specifying the coordinates on a wafer cassette, so that it is also practicable to make automatic calibration using this specimen.;COPYRIGHT: (C)1996,JPO