Fluid processor and the filter booth and management manner null is used for this of the filter which needs perfect test

摘要

PROBLEM TO BE SOLVED: To provide a fluid processing mechanism, a filter booth used for the fluid processing mechanism, and a filter control method wherein a filter and an outlet side piping from the filter are prevented from being contaminated by particles and any falling fungus, etc., upon exchange of the filter, and hence are prevented from being badly influenced by a completeness test of the filter.;SOLUTION: There are provided a primary side working space 6 where there are disposed apparatuses for applying processings for a fluid before passing through a Filter 2 requiring a completeness test, and a secondary side working space 7 where there are disposed apparatuses for applying processings for the fluid after passing through the filter 2. The filter 2 is disposed in a filter booth 8 that forms a space for accommodating the filter 2, and an exhaust outlet is provided for clean air in the filter booth 8. Hereby, there is kept unchanged predetermined cleanliness capable of preventing the filter 2 from being contaminated upon the exchange of the filter 2 while upon the completeness test of the filter 2 temperature conditions of the filter 2 suitable for the same test are kept unchanged.;COPYRIGHT: (C)2001,JPO