The ITO sintering body and its production manner and membrane manner null of the ITO film which uses the aforementioned ITO sintering

摘要

PROBLEM TO BE SOLVED: To obtain ITO coating having stable transparency and electric conductivity and furthermore free from defects such as pinholes. SOLUTION: The raw material of an ITO sintered compact consisting essentially of indium oxide and tin oxide is incorporated with SiO2 and MgO or SiO2 , MgO and Al2 O3 respectively in prescribed rations, which is subjected to compressive molding under relatively low pressure of 0.2 to 20MPa into a pellet shape or the like, and heating and sintering are executed. When ITO coating is formed by vacuum-deposition or sputtering with this ITO sintered compact as an evaporating source or a target, the ITO coating having a tin content same as that in the ITO sintered compact and furthermore free from pinholes or the like can be formed.