Pressure control manner null of sealed cabin, and

摘要

PURPOSE: To prevent an attachment of particles on the surface of a body to be processed beforehand by suppressing the occurrence of the current of a gas in a conveying path caused by the conveyance of the body to be processed. ;CONSTITUTION: A conveying means conveys a body to be processed 20. Airtight conveying paths 3, 4, 5 and 8, on which a body to be processed 20 is conveyed with a conveying means 30, are provided in a conveying apparatus 1. The conveying paths 3, 4, 5 and 8 are filled with the gas, whose specific gravity is heavier than air. A supplying means, which supplies the gas into the conveying paths 3, 4, 5 and 8, is provided. The apparatus is constituted of these parts.;COPYRIGHT: (C)1994,JPO&Japio