SUBSTRATE HEATING METHOD, ELECTRIC FIELD RADIATING ELECTRONIC SOURCE, AND METHOD FOR MANUFACTURING ELECTRIC FIELD RADIATING ELECTRONIC SOURCE

摘要

PROBLEM TO BE SOLVED: To provide a substrate heating method capable of uninformizing temperatures in a plane of a substrate to be treated, and to provide an electric field radiating electronic source and its manufacturing method in which in-plane variations such as characteristics are smaller than those of a prior art. ;SOLUTION: When a substrate C to be treated is heated by a heating source B comprising a lamp heater, an infrared-rays shelter 40 is provided between the heating source B and the substrate C so that infrared rays radiated from the heating source B are not directly irradiated on the substrate C, and the substrate C is heated by the re-radiation of the infrared-rays shelter 40.;COPYRIGHT: (C)2004,JPO