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Electrode in a discharge produced plasma extreme ultraviolet source
Electrode in a discharge produced plasma extreme ultraviolet source
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机译:电极在放电时产生等离子体的极紫外线源
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摘要
An electrode in an extreme ultraviolet (EUV) source of an EUV lithography tool. The extreme ultraviolet source may be operable to produce a plasma which emits extreme ultraviolet radiation.
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