首页> 外国专利> Multipoint minute electrode, device for measuring a living organism voltage, method for fabricating the multipoint minute electrode, and method for fabricating the living organism voltage-measuring device

Multipoint minute electrode, device for measuring a living organism voltage, method for fabricating the multipoint minute electrode, and method for fabricating the living organism voltage-measuring device

机译:多点微小电极,生物体电压测定装置,多点微小电极的制造方法以及生物体电压测定装置的制造方法

摘要

On a given substrate are successively formed electrode patterns constituting electrode wirings for measuring points, respectively. Then, an insulating layer and an underlayer covering the electrode patterns are etched and removed to expose the substrate, which suffers from anisotropic etching using a given etching solution, to fabricate a multipoint minute electrode with a sharpened probe and a supporter for the probe.
机译:在给定的基板上连续形成分别构成用于测量点的电极布线的电极图案。然后,蚀刻并去除覆盖电极图案的绝缘层和底层,以暴露基板,该基板经受使用给定蚀刻溶液的各向异性蚀刻,以制造具有尖锐探针和探针支撑体的多点微小电极。

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