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Multipoint minute electrode, device for measuring a living organism voltage, method for fabricating the multipoint minute electrode, and method for fabricating the living organism voltage-measuring device
Multipoint minute electrode, device for measuring a living organism voltage, method for fabricating the multipoint minute electrode, and method for fabricating the living organism voltage-measuring device
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机译:多点微小电极,生物体电压测定装置,多点微小电极的制造方法以及生物体电压测定装置的制造方法
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摘要
On a given substrate are successively formed electrode patterns constituting electrode wirings for measuring points, respectively. Then, an insulating layer and an underlayer covering the electrode patterns are etched and removed to expose the substrate, which suffers from anisotropic etching using a given etching solution, to fabricate a multipoint minute electrode with a sharpened probe and a supporter for the probe.
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