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Electrodeposited photoresist and dry film photoresist photolithography process for printed circuit board patterning

机译:电沉积光刻胶和干膜光刻胶光刻工艺用于印刷电路板图案化

摘要

A hybrid photolithography process for printed circuit board patterning combines two types of photoresist applications to achieve superior protection of printed circuit board (PCB) ‘plated through holes’ (PTH). In a first step, electro-deposited (ED) photoresist (also known as “ED resist”) is applied to a fully copper plated PCB including the ‘plated through holes’ to protect the outer layers and the ‘plated through holes’ from copper etchant solution. In a second step, the electro-deposited photoresist is imaged (exposed) and patterned (developed). In a third step, after developing the circuit image, a layer of Dry Film resist is applied to the panel of the PCB on top of the developed electro-deposited (ED) photoresist. This Dry Film resist layer will ‘tent’ the plated through holes by adding an extra layer of protection to the plated through holes. In a fourth step, the dry film resist is then exposed and developed. At this point, the PCB is etched as normal and all subsequent processing remains unchanged.
机译:用于印刷电路板构图的混合光刻工艺结合了两种类型的光刻胶应用,以实现对“电镀通孔”的印刷电路板(PCB)的出色保护。 (PTH)。第一步,将电沉积(ED)光致抗蚀剂(也称为“ ED抗蚀剂”)应用于包括“镀通孔”在内的全铜镀PCB。保护外层和“通孔镀层”从铜蚀刻液中提取。在第二步骤中,对电沉积的光致抗蚀剂进行成像(曝光)和构图(显影)。在第三步骤中,在显影电路图像之后,在已显影的电沉积(ED)光致抗蚀剂之上,将一层干膜抗蚀剂施加到PCB板上。该干膜抗蚀剂层将“帐篷”化。通过在镀通孔上添加一层额外的保护层来保护镀通孔。在第四步骤中,然后曝光并显影干膜抗蚀剂。此刻,PCB正常蚀刻,所有后续处理均保持不变。

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