Phase-shifted distributed feedback type semiconductor laser diode capable of improving wavelength chirping and external reflection return light characteristics and method for manufacturing the same

摘要

In a distributed feedback type semiconductor layer diode including a semiconductor substrate, an optical guide layer formed on the semiconductor substrate, a diffraction grating having a phase shift region being formed between the semiconductor substrate and the optical guide layer, and an active layer formed on the optical guide layer, ;where is a coupling coefficient of the diffraction grating, L is a cavity length of the diode, is a detuning amount denoted by _g where _g is a gain peak wavelength of the diode and is an oscillation wavelength of the diode, A is a constant from 0.04 nm¹ to 0.06 nm¹, and B is a constant from 3.0 to 5.0.