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Magnetic field sensor utilizing anomalous hall effect magnetic film
Magnetic field sensor utilizing anomalous hall effect magnetic film
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机译:利用异常霍尔效应磁膜的磁场传感器
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摘要
A magnetic field sensor for sensing an applied magnetic field by utilizing a Hall effect. Used, as a sensor portion, are compound materials such as FeN showing a significant anomalous Hall effect, and materials containing magnetic properties such as a magnetic semiconductor having a zincblende structure and oxide having a perovskite structure. A device structure of the magnetic field sensor is adopted, in which by providing a current terminal to a film and a voltage terminal thereof respectively in a film thickness direction and in an in-plane direction, the magnetic field can be guided into the in-plane direction.
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