首页>
外国专利>
Phase shifting mask topography effect correction based on near-field image properties
Phase shifting mask topography effect correction based on near-field image properties
展开▼
机译:基于近场图像特性的相移掩模形貌效应校正
展开▼
页面导航
摘要
著录项
相似文献
摘要
Image intensity imbalance created by a phase shifting mask (PSM) layout can be corrected using a near-field image. Because an aerial image is not used, various parameters associated with the exposure conditions and stepper need not be considered, thereby significantly simplifying the computations to determine the appropriate correction. Of importance, using the near-field image can provide substantially the same correction generated using the aerial image. Thus, using the near-field image can provide an accurate and quick correction for image intensity imbalance between shifters of different phases. After correcting for the image intensity imbalance, additional proximity correction techniques can be applied to the layout to correct-for other effects.
展开▼