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Plasma cleaning gas with lower global warming potential than SF6
Plasma cleaning gas with lower global warming potential than SF6
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机译:等离子清洁气体,其全球变暖潜能低于SF6
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摘要
A process for cleaning a deposit from an interior surface of a processing chamber includes generating a plasma from a cleaning gas including SO2F2 and contacting the interior surface with the plasma for a time sufficient to convert the deposit into a volatile product, thereby cleaning the deposit from the interior surface, in which the process is conducted in the absence of SF6. The deposits, which may be removed by the process of the invention, include silicone, silicone oxide, silicone nitride, tungsten, copper and aluminum.
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机译:一种用于从处理室的内表面清洁沉积物的方法,包括从包含SO 2 Sub> F 2 Sub>的清洁气体中产生等离子体,并使该内表面与等离子体接触以进行处理。足以将沉积物转化为挥发性产品,从而从内表面清除沉积物的时间,在该过程中,不存在SF 6 Sub>。可以通过本发明的方法去除的沉积物包括硅树脂,硅氧化物,硅氮化物,钨,铜和铝。
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