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Filter sheet and process for purifying photoresist composition employing the filter sheet
Filter sheet and process for purifying photoresist composition employing the filter sheet
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机译:滤片和使用该滤片的光致抗蚀剂组合物的纯化方法
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摘要
A filter sheet is provided which comprises a self-supporting fibrous matrix having immobilized therein particulate filter aid and particulate ion exchange resin, wherein said particulate filter aid and particulate ion exchange resin are distributed substantially uniformly throughout a cross-section of said matrix. A process for removing ionic impurities from a photoresist solution is also provided which comprises passing the photoresist solution through said filter sheet to remove ionic impurities therefrom.
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