A folded waveguide CO2 laser includes a plurality of waveguides arranged in a zigzag pattern with ends thereof overlapping. The laser includes a resonator having an axis extending through the plurality of waveguides. At least a portion of at least one of the waveguides has a uniform minimum width selected cooperative with the height of the waveguide and the laser wavelength such that the resonator can oscillate in only a single mode. At least a portion of one of the waveguides is tapered such that its width increases in one direction along the resonator axis. Tapering one or more of the waveguides provides that the total waveguide area and potential power output of the laser is greater than that of a zigzag arrangement of waveguides having the same total length waveguides each having a uniform width equal to the minimum width of the waveguide in the tapered waveguide arrangement.
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