Plasma generation by mode-conversion of RF-electromagnetic wave to electron cyclotron wave

摘要

A method of plasma generation is provided in which the application of a static magnetic field perpendicular to the direction of the RF electric field allows for the propagation of an electromagnetic wave from a coil outside the chamber, through a dielectric window and into the plasma. The RF electric field and the DC magnetic field are both in the plane of the dielectric window in what may be called a planar helicon configuration. Due to magnetic field effects, the electromagnetic wave excites an electron cyclotron wave that heats the electrons by mode conversion of the whistler wave a few centimeters from the dielectric window where a mode conversion relationship among characteristic antenna wavelength, generator frequency, magnetic field strength and plasma electron density is satisfied The curvature of the magnetic field lines generates plasma flows that expel the plasma towards the processing space.