The present invention discloses a flexible recipe modeling system and method for improving the processing reliability of a fabrication process by customizing recipes processed by fabrication equipment by allowing a responsible engineer to add or modify individual recipe clusters. More particularly, the present system and method provides a recipe cluster management system (RCMS) for grouping of recipes into clusters to represent the same process capacity for a piece of fabrication equipment and provides a material execute system having recipe cluster management engine (RCME) for management of the RCMS. The RCME provides a user interface to simplify complex naming rules for processing of orders having different processing capacity requirements for associated different chambers of a multi-chamber processing machine. Also, the a method for using the RCMS provides a method to define new processes and allocate new equipment resources within a fabrication process.
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