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System for safeguarding integrated intrabay pod delivery and storage system
System for safeguarding integrated intrabay pod delivery and storage system
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机译:保障集成式海湾内豆荚运送和存储系统的系统
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摘要
A system is disclosed for safeguarding fab operators and workpieces such as semiconductor wafers from harm as a result of collision between an operator and a transport assembly for the workpieces as the workpieces are transported between tools and storage nests within a tool bay.
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