Flexible dispatching system and method for coordinating between a manual automated dispatching mode

摘要

The present invention discloses a tool control system (TCS) having an operation management interface providing an interface for an operator to communicate with the tool control system and with an associated piece of processing equipment to allow coordination between manual and automatic dispatching of FOUPs (Front Opening Unified Pods) to the equipment within a full automatic fab. The TCS provides a daily monitoring support function allowing operators to decide when to perform a daily monitor and when to manually insert selected lots into the TCS. Additionally, a method of using the TCS to relax the loading of a wafer dispatching system is disclosed. The method provides for using manual and automated pre-dispatching functions to allow manual insertion of FOUPs within an overhead transport system and to allow prioritizing of individual wafer lots and batches of wafer lots with real-time activity in a manner optimally minimizing downtime within the TCS.