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Waveguide-based bragg gratings with spectral sidelobe suppression and method thereof

机译:具有谱旁瓣抑制的基于波导的布拉格光栅及其方法

摘要

A waveguide Bragg grating (WBG) is apodized by varying the duty cycle of selected grating periods while fixing the pitch of the grating periods. In one embodiment, the WBG is implemented in a silicon substrate using polysilicon filled trenches of varying width while keeping the grating periods' pitch constant. The polysilicon trenches are formed so that if the width of one trench is increased compared to an adjacent grating period, the trench width in the other adjacent grating period (if present) is decreased.
机译:通过改变选定光栅周期的占空比,同时固定光栅周期的间距,可以对波导布拉格光栅(WBG)进行变迹。在一实施例中,WBG是在硅衬底中使用宽度可变的多晶硅填充沟槽来实现的,同时保持光栅周期的间距恒定。形成多晶硅沟槽,使得如果一个沟槽的宽度与相邻的光栅周期相比增加,则在另一相邻的光栅周期(如果存在)中的沟槽宽度减小。

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