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Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
Anti-reflective coating of polymer with epoxide rings reacted with light attenuating compound and unreacted epoxide rings
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机译:具有环氧环的聚合物的减反射涂层,与光衰减化合物和未反应的环氧环反应
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摘要
Anti-reflective compositions and methods of using those compositions with low dielectric constant materials are provided. In one embodiment, the compositions include polymers comprising recurring monomers having unreacted epoxide groups. In another embodiment, the polymers further comprise recurring monomers comprising epoxide rings reacted with a light attenuating compound so as to open the ring. The compositions can be applied to dielectric layers so as to minimize or prevent reflection during the dual damascene process while simultaneously blocking via or photoresist poisoning which commonly occurs when organic anti-reflective coatings are applied to low dielectric constant layers.
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