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Method of fabricating uncooled IR detector and arrays using colossal magneto-resistive materials and rock salt structure material substrates

机译:使用巨大的磁阻材料和盐岩结构材料衬底制造非冷却红外探测器和阵列的方法

摘要

A method of fabricating a colossal magneto-resistive detector using a thin film transfer method includes the use of a rock salt structure material as a substrate. In a second embodiment, the method includes the use of a perovskite oxide material as the substrate, and the rock salt structure material as a buffer layer, template layer, and release layer. Advantages associated with the method include not only the ability to produce a detector of the requisite film quality, but one which satisfies the temperature coefficient of resistance and fabrication temperature constraints. In addition, when employed as either the substrate or the buffer layer, template layer, and release layer, after bonding the rock salt structure material can be easily removed using water, and the excess rock salt structure material/water solution can then be removed with known techniques.
机译:使用薄膜转移方法制造巨大的磁阻检测器的方法包括使用岩盐结构材料作为基板。在第二实施例中,该方法包括使用钙钛矿氧化物材料作为衬底,以及使用岩盐结构材料作为缓冲层,模板层和释放层。与该方法相关的优点不仅包括能够生产出所需膜质量的检测器的能力,而且还包括满足电阻温度系数和制造温度限制的能力。另外,当用作基材或缓冲层,模板层和剥离层的任一种时,在结合后,可以容易地用水除去岩盐结构材料,然后可以用过量的岩盐结构材料/水溶液除去。已知技术。

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