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Multi-sectional plasma generator with discharge gaps between multiple elements forming a plasma discharge cavity
Multi-sectional plasma generator with discharge gaps between multiple elements forming a plasma discharge cavity
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机译:具有在形成等离子体放电腔的多个元件之间具有放电间隙的多截面等离子体发生器
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摘要
A discharge tube is assembled from three sections formed of metal. A first discharge tube element and a second discharge tube element are connected with an insulator for forming a discharging gap and vacuum-sealing interposed between connecting flanges of both discharge tube elements along with an O-ring. The first discharge tube element and a third discharge tube element and a third discharge tube element are connected in a similar manner, and a discharge gap is formed between adjacent discharge tube elements. A high-frequency power supply is connected to each discharge tube element. Respective discharge tube elements are provided with cooling medium flow paths separately each other.
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