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Fabry-perot resonator and system for measuring and calibrating displacement of a cantilever tip using the same in atomic force microscope
Fabry-perot resonator and system for measuring and calibrating displacement of a cantilever tip using the same in atomic force microscope
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机译:法布里-珀罗共振器和用于在原子力显微镜中测量和校准悬臂尖端位移的系统
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摘要
Disclosed is an atomic force microscope. A Fabry-Perot interferometer where the intensity of light reflected at a cantilever through an optical fiber varies sensitively to a displacement of the cantilever is constructed to accurately measure a distance between the optical fiber and the cantilever. A Fabry-Perot resonator is formed by the optical fiber having an end of a concave mirror shape and a reflective surface of the cantilever. A displacement of a cantilever tip is measured by detecting a signal reflected at the resonator and a feedback signal corresponding to a variation in the displacement of the cantilever tip is generated. The displacement of the cantilever tip is kept constant by actuating a piezoelectric element in a Z-axis direction.
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