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Device and method for detecting the drive state of a turbo pump in a tandetron accelerator of an ion implantation device
Device and method for detecting the drive state of a turbo pump in a tandetron accelerator of an ion implantation device
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机译:用于检测离子注入装置的正电子加速器中的涡轮泵的驱动状态的装置和方法
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摘要
A technique is disclosed for detecting a turbo pump drive state in a tendetron accelerator that accelerates an ion beam to implant ions onto a semiconductor wafer. In particular the method of detecting a turbo pump driving state in the accelerator includes the steps of detecting a current applied to the turbo pump in the accelerator; converting the detected current to an optical signal to transmit it through an optical fiber; converting the optical signal transmitted through the optical fiber to an electric signal; displaying the current value of the converted electric signal; comparing the current value of the converted electric signal with a setting current value to generate an interlocking signal when the current value is out of a given range of the setting current value; and cutting off a power supply of the tendetron accelerator in accordance with the interlocking signal.
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