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Vapor phase surface modification of composite substrates to form a molecularly thin release layer
Vapor phase surface modification of composite substrates to form a molecularly thin release layer
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机译:复合材料基材的汽相表面改性以形成分子薄的脱模层
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摘要
A method of exposing a composite organic/inorganic master to alkylchlorosilanes in the vapor phase. Chlorosilanes participate in facile reactions with hydroxyl groups existing on the surface of inorganic oxides (such as glass or the native oxides on silicon, aluminum, tin, etc.); or those in organics-containing phenolic or alcoholic groups, such as photoresists. The alkyl group on the silane can be chosen from a large selection of aliphatic or aromatic organic groups that have substituents with varying polarity and reactivity.
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