HIGH-FREQUENCY DISCHARGE EXCITED OXYGEN GENERATOR FOR IDINE LASER AND HIGH-FREQUENCY DISCHARGED EXVITED OXYGEN GENETING METHOD

摘要

A high-frequency discharge excited oxygen generated comprise: a hallow cathode 2 plasma channel e3 opend; an anode 4 insulated fromthe hollow cathode 2 and disposed on an exhaust side of this hollow cathode 2. The excited oxygen generatedsupplies the plasma channel e3 of the hollow cathode 2 with o2 gas or amixed fas,in which o2 gas and another gas are mixed, and producves singler excited oxygen. Further, the excited generated comprises an injector 10 for supplying NO gas toward the center of the plasma channel 3 disposed on the supply the the plasma channel 3. The NO gas supplied to the central portion of the plasma channel 3is not dissiciated into nitrogen and oxygen an dexcited o2 gas to excited oxygen.