首页>
外国专利>
METHOD AND APPARATUS FOR TRANSFERRING AND LOADING A RETICLE WITH A ROBOTIC RETICLE END-EFFECTOR
METHOD AND APPARATUS FOR TRANSFERRING AND LOADING A RETICLE WITH A ROBOTIC RETICLE END-EFFECTOR
展开▼
机译:用机器人十字头端接子传递和加载十字线的方法和装置
展开▼
页面导航
摘要
著录项
相似文献
摘要
METHOD AND APPARATUS FOR TRANSFERRING AND LOADING ARETICLE WITH A ROBOTIC RETICLE END-EFFECTORABSTRACT OF THE DISCLOSUREAn apparatus and method of transferring and loading a reticle onto areceiving station (for example, a reticle exposure stage). The reticle is first retrieved from a storage facility with an end effector having an reticle plate coupled to a mounting plate. The mounting plate connects the end effector to a robotic arm. The reticle is aligned in an out-of plane position in an off-line alignment station. The alignment is in compliance with the alignment requirement at the receiving station. The reticle is mounted onto the reticle plate after undergoing the alignment at the off line alignment station The reticle is then transferred from the off line alignment station to the receiving station while maintaining the previous alignment at the off line alignment station. The apparatus further provides rigidity of the mounted reticle to ensure compliance with the alignment requirement at the receiving station.Figure 2
展开▼