Air leakage prevention device for HEPA filter in clean room air supply system, comprises chamber connected to under-pressure part of the supply system

摘要

A chamber (30) around a filter (4) is connected to an under-pressure part of an air supply system so that in the event of air leakage from one side of the filter to the other, the leaking air is sucked into the under-pressure part of the system. A device for preventing leakage between the entrance and exit side of a filter unit in an air supply system comprises a chamber extending around the filter, inside which the pressure maintained at a value less than that outside the chamber. Air leaking from the entrance side of the filter is sucked away via this chamber due to the under-pressure inside it. The chamber is connected to the under-pressure part of the air supply system so that the chamber pressure is less than the pressure on both the entrance and exit sides, so that in the event of air leakage from one side to the other, the leaking air is sucked into this under-pressure part. An Independent claim is also included for an air supply system for a clean room environment, containing a HEPA filter unit with this air leakage device.