LASER HAVING IMPROVED BEAM QUALITY AND REDUCED OPERATING COST

摘要

Disclosed is a laser useful in, e.g., photolithography or medical surgery. Inoneembodiment, the laser comprises a discharge chamber and heat-generatingelectronicsthat are enclosed in a baffled enclosure that requires less cooling air toreliably cool thecomponents in the enclosure than previous unbaffled enclosures. A method ofreducing the amount of conditioned air is also provided. In a furtherembodiment, thelaser has a heat-exchange system that acts quickly in response to changes inlaser gastemperature by adjusting a flow-proportioning valve regulating water flowthrough aheat exchanger, thereby providing a continuously variable rate of heatexchangethrough the heat exchanger to maintain the lasing gas temperature constant.Methodsof providing a laser beam and of improving the uniformity of a laser beam aredisclosed, as are photolithography methods utilizing a laser and method ofthisinvention.