PRODUCTION METHOD FOR PHOTORESIST MASTER, PRODUCTION METHOD FOR OPTICAL RECORDING MEDIUM-PRODUCING STAMPER, STAMPER, PHTORESIST MASTER, STAMPER INTERMEDIATE ELEMENT AND OPTICAL RECRODING MEDIUM

摘要

PROBLEM TO BE SOLVED: To manufacture a stamper for producing an optical recording medium by forming a projecting and recessing pattern without a developing process of a photoresist layer.;SOLUTION: The manufacturing method of the stamper for producing the optical recording medium includes: a process in which a light absorbing layer 14 and a photoresist layer 16 are formed on a glass substrate 10 in this order; a process in which the layer 16 is irradiated with laser light beams from the opposite side of the layer 14 to remove a portion of the layer 16 by the laser energy and a photoresist master disk 26 is manufactured by forming a projecting and recessing pattern 22 made of undeveloped photoresist; a process in which a metallic thin film 28 is formed on the pattern 22 of the disk 26; a process in which a metallic film 30 is formed on the film 28 by electric field plating; and a process in which the films 28 and 30 are pealed off from the disk 26 to form the stamper 36.;COPYRIGHT: (C)2004,JPO