A method and apparatus for infrared pyrometer calibration in a thermal processing system

摘要

A calibration instrument (100) for calibrating a temperature probe, such as pyrometer (50), uses a stable light source, such as a light emitting diode (115), to simulate a blackbody of a known temperature. The light source is located inside a chamber (222) and emits light through an aperture (110). The calibration instrument may be inserted into a thermal processing chamber. An alignment tool aligns the aperture to the input of the temperature probe. The calibration instrument may be integrated with the alignment tool, or it may be removable. IMAGE