Impedance variation sensor and application to a flowmeter of the fluidic oscillation type

摘要

An impedance variation measurement sensor has an insulating support (22) carrying two pairs of electrodes (10) with a semiconductor layer under a doped diamond contact layer in contact with the fluid and fed with steady or alternating voltage from an electronic detection circuit (70) so as to obtain a signal not affected by contamination from electrolysis products. An Independent claim is included for use of the sensor in a flow meter by measurement of the oscillation of flow between channels.