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Isolation material for layers in intergrated circuits with damascene archtitecture, comprising molecules having atoms at the surface only, like for example fullerenes
Isolation material for layers in intergrated circuits with damascene archtitecture, comprising molecules having atoms at the surface only, like for example fullerenes
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机译:具有大马士革结构的集成电路中各层的隔离材料,仅包含在表面仅具有原子的分子,例如富勒烯
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摘要
Insulating layer material for integrated circuits in damascene architecture contains or consists of molecules (I), with atoms only on the surface, that are separated from one another by other (groups of) molecules (II) having at least 2 positions bound by chemical and/or physical interactions with (I).
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