首页> 外国专利> MULTIPLE PLATE TIP OR SAMPLE SCANNING RECONFIGURABLE SCANNED PROBE MICROSCOPE WITH TRANSPARENT INTERFACING OF FAR-FIELD OPTICAL MICROSCOPES

MULTIPLE PLATE TIP OR SAMPLE SCANNING RECONFIGURABLE SCANNED PROBE MICROSCOPE WITH TRANSPARENT INTERFACING OF FAR-FIELD OPTICAL MICROSCOPES

机译:远场光学显微镜透明接口的多板尖端或样品扫描可重构倾斜探针显微镜

摘要

The invention is directed to a scanned probe microscope including one plate allowing for tip scanning and the other allowing for sample scanning, with the optical axis of the scanned probe microscope being free to permit incorporation into standard optical microscopes. The top plate can be hinged onto the bottom plate, or the top plate can simply be placed on the bottom plate and a rough approach is caused by a dc motor or other mechanism which will enable the two flat plate scanners to have a large z range. In another embodiment, the microscope includes three plates which allow sample scanning, tip scanning and two tips to be operational at the same time. A microscope in accordance with the invention may use a liquid cell, may use a near-field optical element made of silicon cantilever technology, or may use an apertureless probe for apertureless near-field scanning optical microscopy. The microscope may use a tuning fork for feedback in any combination of geometries of tip, sample and tuning fork and with or without gluing of the tip to the tuning fork and with control of tip attachment or near-attachment to the tuning fork. The control of tip attachment to the tuning fork may be based on near zero backlash movement technology, and the tuning fork can be used in non-contact, contact and intermittent contact modes of operation. A fiber based feedback system may use either straight or cantilevered fibers, and the detection of signals may be based on amplitude, phase, wavelength or other optical parameters that can be used to monitor the movement of an SPM sensor.
机译:本发明涉及一种扫描探针显微镜,包括一个允许进行尖端扫描的板和另一个允许进行样品扫描的板,该扫描探针显微镜的光轴是自由的以允许结合到标准光学显微镜中。可以将顶板铰接到底板上,或者可以将顶板简单地放在底板上,并且直流电动机或其他机制会导致粗糙的进路,这将使两个平板扫描仪具有较大的z范围。在另一个实施例中,显微镜包括三个板,其允许样品扫描,尖端扫描和两个尖端同时操作。根据本发明的显微镜可以使用液体池,可以使用由硅悬臂梁技术制成的近场光学元件,或者可以使用用于无孔近场扫描光学显微镜的无孔探针。显微镜可以使用音叉以尖端,样品和音叉的几何形状的任意组合进行反馈,并且可以将尖端胶粘到音叉或不将其胶粘到音叉,并且可以控制尖端连接或几乎固定到音叉。尖端到音叉的附接的控制可以基于接近零的反冲运动技术,并且音叉可以用于非接触,接触和间歇接触操作模式。基于光纤的反馈系统可以使用直管或悬臂式光纤,信号的检测可以基于幅度,相位,波长或其他可用于监视SPM传感器运动的光学参数。

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