Leak check apparatus of vacuum equipment

摘要

PURPOSE: An apparatus for sensing the leakage of a vacuum pressure equipment is provided to check accurately the leakage by supplying continuously the helium gases to a driving part or a connecting part. CONSTITUTION: An apparatus for sensing leakage of vacuum pressure equipment includes a helium supply tube(61), a control valve(62), a helium chamber(63), and a helium sensor(64). The helium supply tube(61) is used for transferring helium from a helium storage tank(70) by using a driving pump(80). The control valve(62) is used for controlling a supplying process of the helium gas supplied from the helium supply tube(61). The helium chamber(63) is used for charging the predetermined amount of helium gas by using the control valve(62). The helium sensor(64) is used for checking the helium elements of the exhausted helium gas of a process chamber(10).