FLOW SENSOR SYSTEM, HEAT FLOW SENSOR, HEAT FLOW SENSOR SYSTEM, AND METHOD FOR FORMING HEAT DETECTOR ARRAY ON SUBSTRATE

摘要

PURPOSE: A flow sensor system, a heat flow sensor, a heat flow sensor system, and a method for forming a heat detector array on a substrate are provided to improve inaccuracy in calculating a flow rate of a fluid channel and to decide the flow direction of a fluid. CONSTITUTION: A flow sensor system(10) measures a flow rate of a fluid. The flow sensor system comprises a flow channel(12) defining a central longitudinal axis(A); a monolithic substrate arranged in the flow channel to provide plural paths each transmitting signals; plural transducers arranged on the monolithic substrate in the flow channel, to respond to the fluid flow by changing the signals in relation to the fluid flow; and a signal processor calculating the rate of flow as a function of at least two signals by coupling to at least two signals. At least one of the transducers is disposed closer to the central axis than at least one other transducer.