2 Processing method of family sulfide phosphor doped with lanthanide ion

摘要

PURPOSE: A method for preparing a group 2 metal sulfide fluorescent layer doped with a lanthanide ion is provided, to control the concentration distribution of lanthanides for controlling the brightness and chromaticity of a fluorescent substance and to improve the mobility of a lanthanide ion and the crystallinity of a thin film. CONSTITUTION: The method comprises the step of depositing a group 2 metal sulfide and a lanthanide sulfide repeatedly in the cycle ratio of N:M by atomic layer deposition to form a group 2 metal sulfide fluorescent layer doped with a lanthanide ion. Also the method comprises the step of depositing a group 2 metal sulfide doped with a lanthanide ion and a group 2 metal sulfide not doped with a lanthanide ion alternatively. Plasma is operated when or after H2S is injected as a reaction gas. Preferably plasma is operated only in the cycle depositing the group 2 metal sulfide or the lanthanide sulfide. Preferably the group 2 metal sulfide is selected from CaS, BaS, MgS and SrS; and the lanthanide ion is selected from Ce, Pr, Gd, Eu and Sm.