- Method for fabricating FIB-TEM sample for decreasing noise

摘要

PURPOSE: A method for fabricating a FIB-TEM(focused ion beam-transmission electron microscope) specimen for reducing a noise in analyzing EDS(energy dispersive X-ray spectroscopy) is provided to reduce the noise generated from a Si bulk by performing a dishing saw cutting process and a FIB milling process and by analyzing a generation degree of noise while varying an analysis condition of a material. CONSTITUTION: A portion of a specimen to analyze is cut by a dishing saw. A FIB milling process is performed while varying the depth of each specimen, wherein a thin portion of the specimen is milled to be biased. After a FIB-TEM specimen is completed, the quantity of the noise generated from the Si bulk under the same beam condition is compared to obtain an optimum specimen fabricating condition. A simulation result is compared with an EDS analysis result by simulation.