MicroElectro Mechanical system switch

摘要

PURPOSE: A MEMS(microelectro mechanical system) switch is provided to achieve a stable switching operation and prevent effectively stiction of beams. CONSTITUTION: A MEMS(microelectro mechanical system) switch comprises a substrate(10), a signal line formed on the substrate, a beam(60) being deformed by electrostatic force and being switched electrically with the signal line, and a spring type contact unit provided on the signal line and contacting electrically to the beam. The spring type contact unit is formed with a curvature flip spring shape.