NOVEL ACID GENERATOR HAVING HIGH TRANSPARENCY TO LIGHT OF 220 NM OR LESS AND PHOTOSENSITIVE COMPOSITION CONTAINING THE ACID GENERATOR HAVING HIGH SENSITIVITY, HIGH RESOLUTION, GOOD PROFILE AND WIDE DEFOCUS LATITUDE

摘要

PURPOSE: Provided are a novel acid generator having high transparency to the light of 220 nm or less and a photosensitive composition containing the acid generator having high sensitivity, high resolution, good profile and wide defocus latitude. CONSTITUTION: The photosensitive composition comprises an acid generator which generates an acid by the irradiation of an active ray. The acid generator is represented by the formula I, wherein R1 to R4 are independently H, an alkyl group or an aryl group; Y1 to Y4 are independently an alkyl group or an aryl group; Y1 and Y2, and Y3 and Y4 can combine together to form a ring; X1- and X2- are independently a non-nucleophilic anion; A is a single bond or a (n+1)-valent connecting group; n is 1 or 2; R1 and R2 can combine together to form a ring; R3 and R4 can combine together to form a ring; R1 and A can combine together to form a ring; R1 and R3 can combine together to form a ring; and R3 and A can combine together to form a ring.