nanoscale multilayed permanent magnet including nanoparticles of SmCo6 and Sm2Co17

摘要

PURPOSE: A nano-complex layer permanent magnet thin film including nano-sized ferromagnetic particles and a fabricating method thereof are provided to obtain an excellent magnetic characteristic of a permanent magnet by depositing a repetitive structure of a ferromagnetic and a weak ferromagnetic and performing an annealing process in an exciting state. CONSTITUTION: An amorphous SmCo5 thin film layer and a Co layer are deposited on a substrate by using a sputtering deposition method. A multilayered structure of SmCo5/Co/SmCo5/Co is formed by depositing the amorphous SmCo5 thin film layer and the Co layer on the substrate. A complex structure is formed by using an exchange coupling process between the particles of SmCo5/Sm2Co17 and particles of Co in an exciting state. The thickness of the SmCo5 thin layer is 10 to 30nm. The thickness of the Co layer is 5 to 15nm. The multilayered structure is formed with 10 to 20 layers.