首页> 外国专利> METHOD OF MANUFACTURING SUBSTRATE HAVING CONCAVE PARTS, SUBSTRATE HAVING CONCAVE PARTS, SUBSTRATE HAVING CONCAVE PARTS FOR MICROLENSES, MICROLENS SUBSTRATE, TRANSMISSION SCREEN, AND REAR PROJECTOR

METHOD OF MANUFACTURING SUBSTRATE HAVING CONCAVE PARTS, SUBSTRATE HAVING CONCAVE PARTS, SUBSTRATE HAVING CONCAVE PARTS FOR MICROLENSES, MICROLENS SUBSTRATE, TRANSMISSION SCREEN, AND REAR PROJECTOR

机译:制备具有中空凹部的零件,具有中空凹部的零件,具有中分子的中空凹部的零件,中微子基板,透射屏和后投影仪的制造方法

摘要

PURPOSE: A method of manufacturing a substrate having concave parts, a substrate having concave parts, a substrate having concave parts for microlenses, a microlens substrate, a transmission screen, and a rear projector are provided to enhance the productivity by improving a manufacturing process. CONSTITUTION: A method of manufacturing a substrate having a plurality of concave parts includes a mask forming process, an initial hole forming process, and a concave part forming process. The mask forming process is performed to a mask(6) on a substrate(5). The initial hole forming process is performed to form a plurality of initial holes(61) on the mask by using a physical method. A concave part forming process is performed to form the plurality of concave parts in the substrate by subjecting the mask with the plurality of initial holes to an etching process.
机译:用途:提供一种制造具有凹部的基板的方法,具有凹部的基板,具有用于微透镜的凹部的基板,微透镜基板,透射屏和背面投影仪,以通过改善制造工艺来提高生产率。构成:具有多个凹部的基板的制造方法包括掩模形成工序,初始孔形成工序和凹部形成工序。对基板(5)上的掩模(6)执行掩模形成工艺。通过使用物理方法执行初始孔形成工艺以在掩模上形成多个初始孔(61)。通过对具有多个初始孔的掩模进行蚀刻处理,执行凹部形成工艺以在基板中形成多个凹部。

著录项

  • 公开/公告号KR20040069293A

    专利类型

  • 公开/公告日2004-08-05

    原文格式PDF

  • 申请/专利权人 SEIKO EPSON CORPORATION;

    申请/专利号KR20040005508

  • 发明设计人 SHIMIZU NOBUO;YAMASHITA HIDETO;

    申请日2004-01-28

  • 分类号G02B3/00;

  • 国家 KR

  • 入库时间 2022-08-21 22:48:16

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