MARK POSITION DETECTION APPARATUS FOR DETECTING MARK POSITION BY USING OPTICAL ELEMENT AND NOT MEASUREMENT SAMPLE HAVING OPTICAL CHARACTERISTIC

摘要

PURPOSE: A mark position detection apparatus is provided to detect a mark position by using an optical element and not a measurement sample having an optical characteristic. CONSTITUTION: A mark position detection apparatus includes an illumination optical system(10) and an imaging optical system(20). The illumination optical system(10) illuminates a measurement mark with illumination light. The imaging optical system converges light reflected from the measurement mark so as to form an image of the measurement mark onto an image photographing device(30). The mark position detection apparatus measures a positional displacement of the measurement mark by processing an image signal obtained by the image photographing device(30). The mark position detection apparatus forms an optical element in the imaging optical system(20). The optical element compensates for an asymmetric difference of the image signal due to a wavelength of the illumination light.