SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, DEVELOPMENT METHOD AND DEVELOPMENT APPARATUS TO OPTIMIZE SUBSTRATE CONVEYING SPEED

摘要

PURPOSE: A substrate processing method is provided to optimize a substrate conveying speed without causing a collision accident on a convey path, and to efficiently and safely reduce a conveying speed of a substrate. CONSTITUTION: A plurality of substrates to be processed are sequentially conveyed on a convey path for desired tack time Tt so that a desired process is performed on the substrate on the convey path. The lowest transfer speed Vlow of the substrate is determined based upon the tack time, the length dimension D of the substrate in a conveying direction, and a desired minimum substrate distance d. The speed at which the substrate is transferred on the convey path is set at a speed not lower than the lowest transfer speed.