PROCESS METHOD AND PROCESS APPARATUS TO AVOID CONDENSATE AND PERFORM HIGH-QUALITY PROCESS

摘要

PURPOSE: A process method is provided to avoid condensate and perform a high-quality process without reducing predetermined yield and throughput by exhausting a corresponding atmosphere replacement chamber and by reducing the quantity of the first gas to be introduced to the atmosphere replacement chamber. CONSTITUTION: An atmosphere replacement chamber includes the first and second gate valves. A predetermined treatment is performed on an object to be processed in a receptacle whose inside is maintained as a decompressed or vacuum atmosphere. The atmosphere replacement chamber is coupled to the receptacle through the first gate valve and is coupled to a different space than the receptacle through the second valve. While the first gas with humidity not higher than a predetermined value is introduced to the atmosphere replacement chamber, a corresponding atmosphere replacement chamber is exhausted. The quantity of the first gas to be introduced to the atmosphere replacement chamber is reduced to exhaust.